marcel heertjes
marcel heertjes
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Zitiert von
Zitiert von
MIMO feed-forward design in wafer scanners using a gradient approximation-based algorithm
M Heertjes, D Hennekens, M Steinbuch
Control Engineering Practice 18 (5), 495-506, 2010
Constrained iterative feedback tuning for robust control of a wafer stage system
MF Heertjes, B Van der Velden, T Oomen
IEEE transactions on control systems technology 24 (1), 56-66, 2015
Nonlinear iterative learning control with applications to lithographic machinery
M Heertjes, T Tso
Control Engineering Practice 15 (12), 1545-1555, 2007
Industry engagement with control research: Perspective and messages
T Samad, M Bauer, S Bortoff, S Di Cairano, L Fagiano, PF Odgaard, ...
Annual Reviews in Control 49, 1-14, 2020
Performance-improved design of N-PID controlled motion systems with applications to wafer stages
MF Heertjes, XGP Schuurbiers, H Nijmeijer
IEEE Transactions on Industrial Electronics 56 (5), 1347-1355, 2009
Frequency-domain tools for stability analysis of reset control systems
S Van Loon, KGJ Gruntjens, MF Heertjes, N van de Wouw, W Heemels
Automatica 82, 101-108, 2017
Performance of convergence-based variable-gain control of optical storage drives
N van de Wouw, HA Pastink, MF Heertjes, AV Pavlov, H Nijmeijer
Automatica 44 (1), 15-27, 2008
Nonlinear dynamics and control of a pneumatic vibration isolator
M Heertjes, N van de Wouw
Stability and performance of a variable gain controller with application to a dvd storage drive
M Heertjes, M Steinbuch
Automatica 40 (4), 591-602, 2004
Hybrid integrator design for enhanced tracking in motion control
DA Deenen, MF Heertjes, W Heemels, H Nijmeijer
2017 American Control Conference (ACC), 2863-2868, 2017
Active vibration isolation of metrology frames; a modal decoupled control design
M Heertjes, K de Graaff, JG van der Toorn
Control of wafer scanners: Methods and developments
MF Heertjes, H Butler, NJ Dirkx, SH Van Der Meulen, R Ahlawat, ...
2020 American Control Conference (ACC), 3686-3703, 2020
Synthesis of variable gain integral controllers for linear motion systems
B Hunnekens, N van de Wouw, M Heertjes, H Nijmeijer
IEEE Transactions on Control Systems Technology 23 (1), 139-149, 2014
Set-point variation in learning schemes with applications to wafer scanners
MF Heertjes, RMJG van de Molengraft
Control Engineering Practice 17 (3), 345-356, 2009
Experimental and numerical analysis of the steady state behaviour of a beam system with impact
ELB Van De Vorst, MF Heertjes, DH Van Campen, A De Kraker, RHB Fey
Journal of Sound and Vibration 212 (2), 321-336, 1998
Second-order reset elements for stage control design
L Hazeleger, M Heertjes, H Nijmeijer
2016 American Control Conference (ACC), 2643-2648, 2016
Hybrid integrator-gain systems: A remedy for overshoot limitations in linear control?
S Van den Eijnden, MF Heertjes, W Heemels, H Nijmeijer
IEEE Control Systems Letters 4 (4), 1042-1047, 2020
Data-based feed-forward control in MIMO motion systems
M Baggen, M Heertjes, R Kamidi
2008 American Control Conference, 3011-3016, 2008
Self-tuning MIMO disturbance feedforward control for active hard-mounted vibration isolators
MA Beijen, MF Heertjes, J Van Dijk, WBJ Hakvoort
Control engineering practice 72, 90-103, 2018
Switching control in vibration isolation systems
MF Heertjes, IH Sahin, N Van De Wouw, WPMH Heemels
IEEE Transactions on Control Systems Technology 21 (3), 626-635, 2012
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