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Marc Sansa
Marc Sansa
CEA - LETI
Verified email at msansa.com
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Cited by
Year
Frequency fluctuations in silicon nanoresonators
M Sansa, E Sage, EC Bullard, M Gély, T Alava, E Colinet, AK Naik, ...
Nature nanotechnology 11 (6), 552-558, 2016
2552016
Neutral mass spectrometry of virus capsids above 100 megadaltons with nanomechanical resonators
S Dominguez-Medina, S Fostner, M Defoort, M Sansa, AK Stark, ...
Science 362 (6417), 918-922, 2018
1182018
Single-particle mass spectrometry with arrays of frequency-addressed nanomechanical resonators
E Sage, M Sansa, S Fostner, M Defoort, M Gély, AK Naik, R Morel, ...
Nature communications 9 (1), 1-8, 2018
912018
Optomechanical mass spectrometry
M Sansa, M Defoort, A Brenac, M Hermouet, L Banniard, A Fafin, M Gely, ...
Nature Communications 11 (1), 1-7, 2020
702020
High-sensitivity linear piezoresistive transduction for nanomechanical beam resonators
M Sansa, M Fernández-Regúlez, J Llobet, Á San Paulo, F Pérez-Murano
Nature communications 5, 2014
512014
Nanomechanical mass sensor for spatially resolved ultrasensitive monitoring of deposition rates in stencil lithography
J Arcamone, M Sansa, J Verd, A Uranga, G Abadal, N Barniol, ...
Small 5 (2), 176-180, 2009
412009
1.3 mm2 Nav-Grade NEMS-Based Gyroscope
M Gadola, A Buffoli, M Sansa, A Berthelot, P Robert, G Langfelder
Journal of Microelectromechanical Systems 30 (4), 513-520, 2021
352021
Enabling electromechanical transduction in silicon nanowire mechanical resonators fabricated by focused ion beam implantation
J Llobet, M Sansa, M Gerbolés, N Mestres, J Arbiol, X Borrisé, ...
Nanotechnology 25 (13), 135302, 2014
342014
Dynamic stencil lithography on full wafer scale
V Savu, MAF van den Boogaart, J Brugger, J Arcamone, M Sansa, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2008
312008
Horizontally patterned Si nanowire growth for nanomechanical devices
M Fernández-Regúlez, M Sansa, M Serra-Garcia, E Gil-Santos, J Tamayo, ...
Nanotechnology 24 (9), 095303, 2013
292013
Erratum: Top-down silicon microcantilever with coupled bottom-up silicon nanowire for enhanced mass resolution (2015 Nanotechnology 26 145502)
G Vidal-Álvarez, J Agustí, F Torres, G Abadal, N Barniol, J Llobet, ...
Nanotechnology 26 (25), 259601, 2015
26*2015
Erratum: Top-down silicon microcantilever with coupled bottom-up silicon nanowire for enhanced mass resolution (2015 Nanotechnology 26 145502)
G Vidal, F Torres, G Abadal, J Llobet, M Sansa, P Francesc, O Gottlieb
Nanotechnology 26 (25), 259601, 2015
26*2015
Top-down silicon microcantilever with coupled bottom-up silicon nanowire for enhanced mass resolution
G Vidal, F Torres, G Abadal, J Llobet, M Sansa, P Francesc, O Gottlieb
Nanotechnology 26 (14), 145502, 2015
262015
Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution
J Verd, M Sansa, A Uranga, F Perez-Murano, J Segura, N Barniol
Lab on a Chip 11 (16), 2670-2672, 2011
252011
Massive manufacture and characterization of single-walled carbon nanotube field effect transistors
I Martin-Fernandez, M Sansa, MJ Esplandiu, E Lora-Tamayo, ...
Microelectronic Engineering 87 (5), 1554-1556, 2010
242010
Electrical transduction in nanomechanical resonators based on doubly clamped bottom-up silicon nanowires
M Sansa, M Fernández-Regúlez, Á San Paulo, F Pérez-Murano
Applied Physics Letters 101 (24), 243115-243115-5, 2012
232012
Resonant Accelerometers Based on Nanomechanical Piezoresistive Transduction
T Miani, T Verdot, A Berthelot, F Maspero, A Koumela, P Robert, ...
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021
112021
Fabrication of functional electromechanical nanowire resonators by focused ion beam implantation
J Llobet, M Gerbolés, M Sansa, J Bausells, X Borrisé, F Perez-Murano
Journal of Micro/Nanolithography, MEMS, and MOEMS 14 (3), 031207-031207, 2015
112015
Tuning piezoresistive transduction in nanomechanical resonators by geometrical asymmetries
J Llobet, M Sansa, M Lorenzoni, X Borrisé, A San Paulo, F Pérez-Murano
Applied Physics Letters 107 (7), 073104, 2015
102015
Monolithic CMOS-MEMS oscillators with micro-degree temperature resolution in air conditions
J Verd, M Sansa, A Uranga, C Pey, G Abadal, F Perez-Murano, N Barniol
Solid-State Sensors, Actuators and Microsystems Conference, 2009 …, 2009
92009
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