MEMS for photonic integrated circuits C Errando-Herranz, AY Takabayashi, P Edinger, H Sattari, KB Gylfason, ...
IEEE Journal of Selected Topics in Quantum Electronics 26 (2), 1-16, 2019
291 2019 MEMS-enabled silicon photonic integrated devices and circuits N Quack, H Sattari, AY Takabayashi, Y Zhang, P Verheyen, W Bogaerts, ...
IEEE Journal of Quantum Electronics 56 (1), 1-10, 2019
95 2019 Silicon photonic microelectromechanical phase shifters for scalable programmable photonics P Edinger, AY Takabayashi, C Errando-Herranz, U Khan, H Sattari, ...
Optics Letters 46 (22), 5671-5674, 2021
84 2021 Integrated silicon photonic MEMS N Quack, AY Takabayashi, H Sattari, P Edinger, G Jo, SJ Bleiker, ...
Microsystems & Nanoengineering 9 (1), 27, 2023
61 2023 Wafer-level vacuum sealing by transfer bonding of silicon caps for small footprint and ultra-thin MEMS packages X Wang, SJ Bleiker, P Edinger, C Errando-Herranz, N Roxhed, G Stemme, ...
Journal of microelectromechanical systems 28 (3), 460-471, 2019
36 2019 MORPHIC: programmable photonic circuits enabled by silicon photonic MEMS W Bogaerts, H Sattari, P Edinger, AY Takabayashi, I Zand, X Wang, ...
Silicon Photonics XV 11285, 1128503, 2020
33 2020 Wafer-level hermetically sealed silicon photonic MEMS G Jo, P Edinger, SJ Bleiker, X Wang, AY Takabayashi, H Sattari, N Quack, ...
Photonics Research 10 (2), A14-A21, 2022
29 2022 Three-dimensional printing of silica glass with sub-micrometer resolution PH Huang, M Laakso, P Edinger, O Hartwig, GS Duesberg, LL Lai, ...
Nature Communications 14 (1), 3305, 2023
27 2023 Broadband compact single-pole double-throw silicon photonic MEMS switch AY Takabayashi, H Sattari, P Edinger, P Verheyen, KB Gylfason, ...
Journal of Microelectromechanical Systems 30 (2), 322-329, 2021
25 2021 Low-loss MEMS phase shifter for large scale reconfigurable silicon photonics P Edinger, C Errando-Herranz, KB Gylfason
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems …, 2019
18 2019 Low power optical phase shifter using liquid crystal actuation on a silicon photonics platform L Van Iseghem, E Picavet, AY Takabayashi, P Edinger, U Khan, ...
Optical Materials Express 12 (6), 2181-2198, 2022
17 2022 Compact low loss MEMS phase shifters for scalable field-programmable silicon photonics P Edinger, C Errando-Herranz, AY Takabayashi, H Sattari, N Quack, ...
CLEO: Science and Innovations, SM3J. 2, 2020
16 2020 A bistable silicon photonic mems phase switch for nonvolatile photonic circuits P Edinger, AY Takabayashi, C Errando–Herranz, U Khan, C Antony, ...
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems …, 2022
13 2022 Wafer-level vacuum sealing for packaging of silicon photonic MEMS G Jo, P Edinger, SJ Bleiker, X Wang, AY Takabayashi, H Sattari, N Quack, ...
Silicon Photonics XVI 11691, 51-57, 2021
10 2021 Low-voltage silicon photonic MEMS switch with vertical actuation H Sattari, AY Takabayashi, P Edinger, P Verheyen, KB Gylfason, ...
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021
10 2021 Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phase P Edinger, G Jo, CP Van Nguyen, AY Takabayashi, C Errando-Herranz, ...
Optics Express 31 (4), 6540-6551, 2023
8 2023 Liquid crystal phase shifter integrated in a silicon photonics platform L Van Iseghem, U Khan, P Edinger, C Errando-Herranz, AY Takabayashi, ...
22nd European Conference on Integrated Optics, ECIO 2020, 2020
7 2020 Silicon photonic microelectromechanical systems add-drop ring resonator in a foundry process H Sattari, AY Takabayashi, P Edinger, P Verheyen, KB Gylfason, ...
Journal of Optical Microsystems 2 (4), 044001, 2022
6 2022 Programmable silicon photonic circuits powered by MEMS W Bogaerts, AY Takabayashi, P Edinger, G Jo, I Zand, P Verheyen, ...
Smart Photonic and Optoelectronic Integrated Circuits 2022 12005, 55-69, 2022
6 2022 Continuously Tunable Silicon Photonic MEMS AY Takabayashi, H Sattari, P Edinger, P Verheyen, KB Gylfason, ...
2021 21st International Conference on Solid-State Sensors, Actuators and …, 2021
5 2021 